tag:blogger.com,1999:blog-37912784656155754362024-02-20T23:46:51.840-08:003-D imaging by sub-surface terahertz nano-scanerTeraSpectra_PA_UShttp://www.blogger.com/profile/11666382451956463729noreply@blogger.comBlogger1125tag:blogger.com,1999:blog-3791278465615575436.post-80173491024083103292013-03-03T06:25:00.001-08:002013-03-03T07:47:44.676-08:00<div style="text-align: center;">
<b><span style="font-family: "Bookman Old Style","serif"; font-size: large; line-height: 115%; mso-ansi-language: EN-US; mso-bidi-font-family: "Times New Roman"; mso-bidi-language: AR-SA; mso-bidi-theme-font: minor-bidi; mso-fareast-font-family: Calibri; mso-fareast-language: EN-US; mso-fareast-theme-font: minor-latin;">Demonstration of
sub-surface 3-D imaging capability</span></b></div>
<div style="text-align: left;">
</div>
<div class="MsoNormal" style="line-height: 150%;">
<span style="font-family: "Bookman Old Style","serif"; font-size: 12.0pt; line-height: 150%;">With the recent
development of improved 3D imaging, ARP’s terahertz scanner is now capable of “seeing”
inside of wafers and other opaque substrates. A scanning image is generated pinpointing location and size of particulate, void, and other defects. In addition, defect
size is quantified by to-the-scale direct measurements. It also visualizes the defects on the nanometer scale. As example is shown in Fig.1 and Fig.2 shows
a 360° view of the same.<o:p></o:p></span></div>
<div class="separator" style="clear: both; text-align: center;">
</div>
<div class="separator" style="clear: both; text-align: center;">
<a href="https://blogger.googleusercontent.com/img/b/R29vZ2xl/AVvXsEglieQkPzUjC2iQpv1vrD0qP0N7z-aJoDOLoPLySjt_vrUpLfEYhYqiacFLY5x2D7uDrn-N3e6FlJUAWOxBHvy-xJDSCQbDYhxjaC_pfYU2gJWoEzDj-8JAv-sbzaet78a_qKRBJ30XRhs/s1600/wafer1.jpg" imageanchor="1" style="margin-left: 1em; margin-right: 1em;"><img border="0" height="141" src="https://blogger.googleusercontent.com/img/b/R29vZ2xl/AVvXsEglieQkPzUjC2iQpv1vrD0qP0N7z-aJoDOLoPLySjt_vrUpLfEYhYqiacFLY5x2D7uDrn-N3e6FlJUAWOxBHvy-xJDSCQbDYhxjaC_pfYU2gJWoEzDj-8JAv-sbzaet78a_qKRBJ30XRhs/s400/wafer1.jpg" width="400" /></a></div>
<div class="separator" style="clear: both; text-align: center;">
<span style="font-family: "Bookman Old Style","serif"; font-size: 12.0pt; line-height: 115%; mso-ansi-language: EN-US; mso-bidi-font-family: "Times New Roman"; mso-bidi-language: AR-SA; mso-bidi-theme-font: minor-bidi; mso-fareast-font-family: Calibri; mso-fareast-language: EN-US; mso-fareast-theme-font: minor-latin;">Fig. 1. Snap shot of patterns on a wafer (not in
scale).</span></div>
<div class="separator" style="clear: both; text-align: center;">
<iframe allowfullscreen='allowfullscreen' webkitallowfullscreen='webkitallowfullscreen' mozallowfullscreen='mozallowfullscreen' width='320' height='266' src='https://www.blogger.com/video.g?token=AD6v5dyLJc7WVJZtQo1ZDNVkWhueaiIJ6GHqEXMT1FLveqWVxwvX20cbd24bJXsgK0g89Okn_kk5U0-I219vJMkGEg' class='b-hbp-video b-uploaded' frameborder='0'></iframe></div>
<div class="separator" style="clear: both; text-align: center;">
<span style="font-family: 'Bookman Old Style', serif; font-size: 16px; line-height: 18px;">Fig. 2. A 360° inside view of the object in Fig. 1.</span></div>
<div class="separator" style="clear: both; text-align: center;">
<span style="font-family: 'Bookman Old Style', serif; font-size: 16px; line-height: 18px;"><br /></span></div>
<div class="separator" style="clear: both; text-align: left;">
<span style="font-family: "Bookman Old Style","serif"; font-size: 12.0pt; line-height: 115%; mso-ansi-language: EN-US; mso-bidi-font-family: "Times New Roman"; mso-bidi-language: AR-SA; mso-bidi-theme-font: minor-bidi; mso-fareast-font-family: Calibri; mso-fareast-language: EN-US; mso-fareast-theme-font: minor-latin;">The terahertz sub-surface scanner from ARP is a
user friendly, easy to use machine. All
operations are automated via included software.
The machine exhibits an unprecedented resolution of a few nanometers in
3 axial directions. Yet scanning is
fast. Screen shot of measurement console
shown in Fig. 3. All parameters are
entered by the front-end interface.
Measured data are accessible for further manipulations.</span></div>
<div class="separator" style="clear: both; text-align: center;">
<a href="https://blogger.googleusercontent.com/img/b/R29vZ2xl/AVvXsEjpwMQNcU17d10Ex6Pkoz4F7IuJCKmjU3sowavMOZ9vhCnzrYNjxYE1ES5h73YYHbQGoSXZ95tzvRWY0_n7VniMqOnYyiQ3-u45uKqgT6VsPZklpHwCCj-3LCanngmpW6sGkUH2kou8KdA/s1600/console..jpg" imageanchor="1" style="margin-left: 1em; margin-right: 1em;"><img border="0" height="202" src="https://blogger.googleusercontent.com/img/b/R29vZ2xl/AVvXsEjpwMQNcU17d10Ex6Pkoz4F7IuJCKmjU3sowavMOZ9vhCnzrYNjxYE1ES5h73YYHbQGoSXZ95tzvRWY0_n7VniMqOnYyiQ3-u45uKqgT6VsPZklpHwCCj-3LCanngmpW6sGkUH2kou8KdA/s400/console..jpg" width="400" /></a></div>
<div class="separator" style="clear: both; text-align: center;">
<span style="font-family: "Bookman Old Style","serif"; font-size: 12.0pt; line-height: 115%; mso-ansi-language: EN-US; mso-bidi-font-family: "Times New Roman"; mso-bidi-font-size: 11.0pt; mso-bidi-language: AR-SA; mso-bidi-theme-font: minor-bidi; mso-fareast-font-family: Calibri; mso-fareast-language: EN-US; mso-fareast-theme-font: minor-latin;">Fig. 3. </span><span style="font-family: "Bookman Old Style","serif"; font-size: 12.0pt; line-height: 115%; mso-ansi-language: EN-US; mso-bidi-font-family: "Times New Roman"; mso-bidi-language: AR-SA; mso-bidi-theme-font: minor-bidi; mso-fareast-font-family: Calibri; mso-fareast-language: EN-US; mso-fareast-theme-font: minor-latin;">Screen shot of measurement
console.</span></div>
<div class="separator" style="clear: both; text-align: left;">
</div>
<div class="MsoNormal" style="line-height: 150%; margin-top: 12.0pt;">
<b><span style="font-family: "Bookman Old Style","serif"; font-size: 12.0pt; line-height: 150%;">Contact information:<o:p></o:p></span></b></div>
<div class="MsoNormal" style="line-height: 150%;">
<span style="font-family: "Bookman Old Style","serif"; font-size: 12.0pt; line-height: 150%;">For more information, please contact:<o:p></o:p></span></div>
<div class="MsoNormal" style="line-height: 150%;">
<span style="font-family: "Bookman Old Style","serif"; font-size: 12.0pt; line-height: 150%;">Anis Rahman, PhD<br />
email: </span><a href="mailto:a.rahman@arphotonics.net"><span style="font-family: "Bookman Old Style","serif"; font-size: 12.0pt; line-height: 150%;">a.rahman@arphotonics.net</span></a><span style="font-family: "Bookman Old Style","serif"; font-size: 12.0pt; line-height: 150%;">
<br />
Phone: 717-623-8201<o:p></o:p></span></div>
TeraSpectra_PA_UShttp://www.blogger.com/profile/11666382451956463729noreply@blogger.com0